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Torsional stress, fatigue and fracture strength in silicon hinges of a micro scanning mirror

Author(s):
  • Wolter, A. ( Fraunhofer-Institut fuer Photonische Mikrosysteme (Germany) )
  • Schenk, H. ( Fraunhofer-Institut fuer Photonische Mikrosysteme (Germany) )
  • Korth, H. ( Fraunhofer-Institut fuer Photonische Mikrosysteme (Germany) )
  • Lakner, H. ( Fraunhofer-Institut fuer Photonische Mikrosysteme (Germany) )
Publication title:
Reliability, Testing, and Characterization of MEMS/MOEMS III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5343
Pub. Year:
2004
Page(from):
176
Page(to):
185
Pages:
10
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452511 [0819452513]
Language:
English
Call no.:
P63600/5343
Type:
Conference Proceedings

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