Reliability issues of an accelerometer under environmental stresses
- Author(s):
Schmitt, P. ( Ctr. National d'Etudes Spatiales (France) and LAAS-CNRS (France) ) Pressecq, F. ( Ctr. National d'Etudes Spatiales (France) ) Perez, G. ( Ctr. National d'Etudes Spatiales (France) ) Lafontan, X. ( Nova MEMS (France) ) Nicot, J.M. ( Ctr. National d'Etudes Spatiales (France) ) Esteve, D. ( LAAS-CNRS (France) ) Fourniols, J.Y. ( LAAS-CNRS (France) ) Camon, H. ( LAAS-CNRS (France) ) Oudea, C. ( EADS (France) ) - Publication title:
- Reliability, Testing, and Characterization of MEMS/MOEMS III
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5343
- Pub. Year:
- 2004
- Page(from):
- 22
- Page(to):
- 30
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452511 [0819452513]
- Language:
- English
- Call no.:
- P63600/5343
- Type:
- Conference Proceedings
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