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The reliability of RF-MEMS: failure modes, test procedures, and instrumentation

Author(s):
De Wolf, I. ( IMEC (Belgium) )  
Publication title:
Reliability, Testing, and Characterization of MEMS/MOEMS III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5343
Pub. Year:
2004
Page(from):
1
Page(to):
8
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452511 [0819452513]
Language:
English
Call no.:
P63600/5343
Type:
Conference Proceedings

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