Characterization of the microloading effect in deep reactive ion etching of silicon
- Author(s):
- Jensen, S. ( Technical Univ. of Demark (Denmark) )
- Hansen, O. ( Technical Univ. of Demark (Denmark) )
- Publication title:
- Micromachining and Microfabrication Process Technology IX
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5342
- Pub. Year:
- 2004
- Page(from):
- 111
- Page(to):
- 118
- Pages:
- 8
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819452504 [0819452505]
- Language:
- English
- Call no.:
- P63600/5342
- Type:
- Conference Proceedings
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