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Fabrication of integrated inductors on silicon for fully integrated DC-DC microconverters

Author(s):
Troussier, Gh. ( LAAS-CNRS (France) )
Laur, J.P. ( LAAS-CNRS (France) )
Sanchez, J.-L. ( LAAS-CNRS (France) )
Bourrier, D. ( LAAS-CNRS (France) )
Conedera, V. ( LAAS-CNRS (France) )
Dilhan, M. ( LAAS-CNRS (France) )
Fabre, N. ( LAAS-CNRS (France) )
Lembeye, Y. ( ENSIEG (France) )
Morel, H. ( CEGELY (France) )
Cogitore, B. ( Microspire (France) )
5 more
Publication title:
Micromachining and Microfabrication Process Technology IX
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5342
Pub. Year:
2004
Page(from):
86
Page(to):
93
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452504 [0819452505]
Language:
English
Call no.:
P63600/5342
Type:
Conference Proceedings

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