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3D patterning method in femtosecond laser microprocessing using diffractive optical elements

Author(s):
  • Kuroiwa, Y. ( New Glass Forum, Tsukuba Research Consortium, Ltd. (Japan) )
  • Takeshima, N. ( New Glass Forum, Tsukuba Research Consortium, Ltd. (Japan) )
  • Narita, Y. ( New Glass Forum, Tsukuba Research Consortium, Ltd. (Japan) )
  • Tanaka, S. ( New Glass Forum, Tsukuba Research Consortium, Ltd. (Japan) )
  • Hirao, K. ( Kyoto Univ. (Japan) )
Publication title:
Photon Processing in Microelectronics and Photonics III
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5339
Pub. Year:
2004
Page(from):
185
Page(to):
193
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819452474 [0819452475]
Language:
English
Call no.:
P63600/5339
Type:
Conference Proceedings

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