Holographic method for obtaining images of two-dimensional objects with limiting high-resolution for extreme short-wave lithography problems

Holographic method for obtaining images of two-dimensional objects with limiting high-resolution for extreme short-wave lithography problems

Author(s):

Koreshev, S.N. ( S.I. Vavilov State Optical Institute (Russia) )
Ratushnyi, V.P. ( HoloGrate JSC (Russia) )

Publication title:

Practical Holography XVIII: Materials and Applications

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5290

Pub. Year:

2004

Page(from):

221

Page(to):

232

Pages:

12

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819451934 [0819451932]

Language:

English

Call no.:

P63600/5290

Type:

Conference Proceedings

Details

TDL ID:	ZA00013634
Series ID:	PA00000029
Conf. info. (Name):	IS&T/SPIE Electronic Imaging : Practical Holography
Conf. info. (Number):	2004 : 18th
Conf. info. (Venue):	San Jose, CA, USA
Conf. info. (Date):	2004.01.19-2004.01.20

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