Novel MEMS torsional mirror optical switch
- Author(s):
- Yang, Y. ( Shanghai Institute of Microsystem and Information Technology (China) )
- Liu, W. ( Shanghai Institute of Microsystem and Information Technology (China) )
- Wu, Y. ( Shanghai Institute of Microsystem and Information Technology (China) )
- Yang, J. ( Shanghai Institute of Microsystem and Information Technology (China) )
- Wang, Y. ( Shanghai Institute of Microsystem and Information Technology (China) )
- Publication title:
- Optical Transmission, Switching, and Subsystems
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5281
- Pub. Year:
- 2004
- Page(from):
- 718
- Page(to):
- 726
- Pages:
- 9
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819451767 [0819451762]
- Language:
- English
- Call no.:
- P63600/5281
- Type:
- Conference Proceedings
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