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Novel MEMS torsional mirror optical switch

Author(s):
  • Yang, Y. ( Shanghai Institute of Microsystem and Information Technology (China) )
  • Liu, W. ( Shanghai Institute of Microsystem and Information Technology (China) )
  • Wu, Y. ( Shanghai Institute of Microsystem and Information Technology (China) )
  • Yang, J. ( Shanghai Institute of Microsystem and Information Technology (China) )
  • Wang, Y. ( Shanghai Institute of Microsystem and Information Technology (China) )
Publication title:
Optical Transmission, Switching, and Subsystems
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5281
Pub. Year:
2004
Page(from):
718
Page(to):
726
Pages:
9
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819451767 [0819451762]
Language:
English
Call no.:
P63600/5281
Type:
Conference Proceedings

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