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Optimization design and fabrication of photonic crystal waveguides based on SOI using 248-nm deep-UV lithography

Author(s):
Publication title:
Materials, Active Devices, and Optical Amplifiers
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5280
Pub. Year:
2004
Page(from):
798
Page(to):
804
Pages:
7
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819451750 [0819451754]
Language:
English
Call no.:
P63600/5280.2
Type:
Conference Proceedings

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