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High-aspect-ratio etching and characterization of 2D photonic crystals in InP/InGaAsP/InP heterostructures

Author(s):
Anand, S. ( Royal Institute of Technology (Sweden) )
Qiu, M. ( Royal Institute of Technology (Sweden) )
Mulot, M. ( Royal Institute of Technology (Sweden) )
Swillo, M. ( Royal Institute of Technology (Sweden) )
Jaskorzynska, B. ( Royal Institute of Technology (Sweden) )
Karlsson, A. ( Royal Institute of Technology (Sweden) )
1 more
Publication title:
Photonics: Design, Technology, and Packaging
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5277
Pub. Year:
2004
Page(from):
78
Page(to):
89
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819451705 [0819451703]
Language:
English
Call no.:
P63600/5277
Type:
Conference Proceedings

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