ICP etching of InP and its applications in photonic circuits

ICP etching of InP and its applications in photonic circuits

Author(s):

Karouta, F. ( Technische Univ. Eindhoven (Netherlands) )

Zhu, Y.C. ( Technische Univ. Eindhoven (Netherlands) )

Geluk, E.J. ( Technische Univ. Eindhoven (Netherlands) )

van der Tol, J.J.G.M. ( Technische Univ. Eindhoven (Netherlands) )

Binsma, J.J.M. ( JDS Uniphase Corp. (Netherlands) )

Smit, M.K. ( Technische Univ. Eindhoven (Netherlands) )

1 more

Publication title:

Photonics: Design, Technology, and Packaging

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5277

Pub. Year:

2004

Page(from):

22

Page(to):

28

Pages:

7

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819451705 [0819451703]

Language:

English

Call no.:

P63600/5277

Type:

Conference Proceedings

Details

TDL ID:	ZA00013619
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Nano-, and Micro- Smart Systems : Photonics
Conf. info. (Number):	2003
Conf. info. (Venue):	Perth, Australia
Conf. info. (Date):	2003.12.10-2003.12.12

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