Blank Cover Image

Determination of residual stress in low-temperature PECVD silicon nitride thin films

Author(s):
Publication title:
Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5276
Pub. Year:
2004
Page(from):
451
Page(to):
462
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819451699 [081945169X]
Language:
English
Call no.:
P63600/5276
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Determination of mechanical properties of silicon nitride thin films using nanoindentation

Martyniuk, M., Antoszewski, J., Walmsley, B. A., Musca, C. A., Dell, J. M., Jung, Y.　-G., Lawn, B. R., Huang, H., …

SPIE - The International Society of Optical Engineering
7 Conference Proceedings The effects of vacuum baking on the I-V characteristics of LWIR HgCdTe photodiodes

Nguyen, T.H., Musca, C.A., Dell, J.M., Antoszewski, J., Faraone, L.

SPIE - The International Society of Optical Engineering
2 Conference Proceedings Chemical structure of low-temperature plasma-deposited silicon nitride thin films

Soh, M.T., Savvides, N., Musca, C.A., Dell, J.M., Faraone, L.

SPIE - The International Society of Optical Engineering
8 Conference Proceedings Isothermal vapor phase epitaxy as a versatile technology for infrared photodetectors

Adamiec,K., Grudzien,M., Nowak,Z., Pawluczyk,J., Piotrowski,J., Antoszewski,J., Dell,J.M., Musca,C.A., Faraone,L.

SPIE-The International Society for Optical Engineering
3 Conference Proceedings Toward MEMS-based infrared tunable microspectrometers

Antoszewski, J., Dell, J.M., Shivalimar, T., Martyniuk, M., Winchester, K., Wehner, J., Musca, C.A., Faraone, L.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings Excess noise in MWIR photovoltaic detectors fabricated using a new junction formation technology

Rais,M.H., Musca,C.A., Dell,J.M., Antoszewski,J., Nener,B.D., Faraone,L.

SPIE - The International Society for Optical Engineering
4 Conference Proceedings Mobility spectrum techniques for characterizing multilayer semiconductors structures

Musca, C.A., Nguyen, T., Antoszewski, J., Redfern, D.A., Dell, J.M., Faraone, L.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Performance of MWIR HgCdTe Photovoltaic Detectors Fabricated by Reactive Ion Etching Induced Type Conversion

Rais,M.H., Musca,C.A., Dell,J.M., Antoszewski,J., Nener,B.D., Faraone,L.

SPIE - The International Society for Optical Engineering
5 Conference Proceedings HgCdTe long-wavelength infrared photovoltaic detectors formed by reactive ion etching

Nguyen, T.T., Dell, J.M., Musca, C.A., Antoszewski, J., Faraone, L.

SPIE-The International Society for Optical Engineering
11 Conference Proceedings RIE-induced n-on-p junction HgCdTe photodiodes: effects of passivant technology on bake stability

Dell,J.M., Antoszewski,J., White,J.K., Pal,R., Nguyen,T., Musca,C.A., Faraone,L.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Thermal Stability in HgCdTe IR Photodiodes

Dell, J.M., Nguyen, T., Musca, C.A., Antoszewski, J., Faraone, L., Pal, R.

Materials Research Society
12 Conference Proceedings Refractive index engineering for a distributed Bragg reflector for a resonant-cavity-enhanced detector

Wehner, J.G.A., Sewell, R., Antoszewski, J., Musca, C.A., Dell, J.M., Faraone, L.

SPIE - The International Society of Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12