Blank Cover Image

High-aspect-ratio fabrications of micro journal air bearings for micro gas turbine engine

Author(s):
Shan, X.C. ( SIMTech (Singapore) )
Murakoshi, Y. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Wang, Z. ( SIMTech (Singapore) )
Lu, H.J. ( SIMTech (Singapore) )
Jin, Y. ( SIMTech (Singapore) )
Ikehara, T. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Maeda, R. ( National Institute of Advanced Industrial Science and Technology (Japan) )
Wong, C.K. ( SIMTech (Singapore) )
3 more
Publication title:
Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5276
Pub. Year:
2004
Page(from):
428
Page(to):
433
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819451699 [081945169X]
Language:
English
Call no.:
P63600/5276
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Development of a MEMS-based micro combustor for a micro gas turbine engine

Shan, X. C., Jin, Y. F., Wang, Z. F., Wang, C. K., Murakoshi, Y., Maeda, R.

SPIE - The International Society of Optical Engineering
7 Conference Proceedings High aspect ratio grating fabrication in SU-8 resist by UV-curing nanoimprint

X. Wang, L. Ge, J. Lu, S. Fu

Society of Photo-optical Instrumentation Engineers
2 Conference Proceedings Micro hot embossing for high-aspect-ratio structure with materials flow enhancement by polymer sheet

Murakoshi, Y., Shan, X.-C., Sano, T., Takahashi, M., Maeda, R.

SPIE - The International Society of Optical Engineering
8 Conference Proceedings Graphite membrane applied for high-aspect-ratio microstructure fabrication

Yang,H., Chou,M.-C., Wang,H.-J., Pan,C.T., Lin,J.L.

SPIE - The International Society for Optical Engineering
3 Conference Proceedings Development of a micro hot embossing process for fabricating micro-optical devices (Invited Paper)

Shan, X.C., Maeda, R., Murakoshi, Y.

SPIE-The International Society for Optical Engineering
9 Conference Proceedings High temperature sealing of kovar-glass-silicon for power MEMS application 6032-06]

Zhao, Y., Miao, M., Jin, Y., Shan, C. X., Wong, K. C.

SPIE - The International Society of Optical Engineering
4 Conference Proceedings Optimization of Au mask fabrication processes for LIGA applications

Shan, X.C., Maeda, R., Ikehara, T., Mekaru, H., Hattori, T.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings LIGA-like process for high-aspect-ratio PZT microstructures

Lee,G.S., Jin,Y.Y., Park,S.J., Ajmera,P.K., Malek,C.Khan, Wang,J.T., Tang,F.

SPIE - The International Society for Optical Engineering
5 Conference Proceedings Universal fixture for assembling and testing of a silicon-based microcombustor

Jin, Y., Shan, X.C., Wang, Z., Zhang, H., Wong, C.K.

SPIE - The International Society of Optical Engineering
11 Conference Proceedings Mechanical quality factor of microcantilevers for mass sensing applications

J. Lu, T. Ikehara, Y. Zhang, T. Mihara, R. Maeda

Society of Photo-optical Instrumentation Engineers
6 Conference Proceedings Hydrostatic Gas Journal Bearings for Micro-Turbomachinery

L. X. Liu, C. J. Teo, A. H. Epstein, Z. S. Spakovszky

American Society of Mechanical Engineers
12 Conference Proceedings Experimental Study of Combustion on a Micro Gas Turbine Combustor

Feng-Shan Wang, Wen-Jun Kong, Bao-Rui Wang

American Society of Mechanical Engineers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12