Quantum electro-mechanical systems (QEMS)

Author(s):

• Utami, D.W. ( Univ. of Queensland (Australia) )
• Goan, H.-S. ( Univ. of New South Wales (Australia) )
• Milburn, G.J. ( Univ. of Queensland (Australia) )

Publication title:

Device and process technologies for MEMS, microelectronics, and photonics III : 10-12 December 2003, Perth, Australia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5276

Pub. Year:

2004

Page(from):

191

Page(to):

201

Pages:

11

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819451699 [081945169X]

Language:

English

Call no.:

P63600/5276

Type:

Conference Proceedings