Evolutions and distributions of Si nanocrystals and other Si oxidation states in Si-implanted SiO2 films

Evolutions and distributions of Si nanocrystals and other Si oxidation states in Si-implanted SiO2 films

Author(s):

Liu, Y. ( Nanyang Technological Univ. (Singapore) )
Chen, T.P. ( Nanyang Technological Univ. (Singapore) )
Tse, M.S. ( Nanyang Technological Univ. (Singapore) )
Fu, Y. ( Nanyang Technological Univ. (Singapore) )

Publication title:

BioMEMS and nanotechnology : 10-12 December 2003, Perth, Australia

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5275

Pub. Year:

2004

Page(from):

374

Page(to):

377

Pages:

4

Pub. info.:

Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819451682 [0819451681]

Language:

English

Call no.:

P63600/5275

Type:

Conference Proceedings

Details

TDL ID:	ZA00013617
Series ID:	PA00000029
Conf. info. (Name):	Smart Materials, Nano-, and Micro- Smart Systems : BioMEMS and nanotechnology
Conf. info. (Number):	2003
Conf. info. (Venue):	Perth, Australia
Conf. info. (Date):	2003.12.10-2003.12.12

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