Resist heating effect on e-beam mask writing at 75 kV and 60 A/cm2
- Author(s):
- Benes, Z. ( IBM Mask House (USA) )
- Deverich, C. ( IBM Mask House (USA) )
- Huang, C. ( IBM Mask House (USA) )
- Lawliss, M. ( IBM Mask House (USA) )
- Publication title:
- 23rd Annual BACUS Symposium on Photomask Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5256
- Pub. Year:
- 2003
- Page(from):
- 1027
- Page(to):
- 1033
- Pages:
- 7
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819451439 [0819451436]
- Language:
- English
- Call no.:
- P63600/5256.2
- Type:
- Conference Proceedings
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