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Fine pixel CD-SEM for measurements of two-dimensional patterns

Author(s):
Yamaguchi, S. ( Toshiba Corp. (Japan) )
Itoh, M. ( Toshiba Corp. (Japan) )
Ikeda, T. ( Toshiba Corp. (Japan) )
Miyano, Y. ( Toshiba Corp. (Japan) )
Mitsui, T. ( Toshiba Corp. (Japan) )
Amma, M. ( Topcon Corp. (Japan) )
Horikawa, S. ( Topcon Corp. (Japan) )
2 more
Publication title:
23rd Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5256
Pub. Year:
2003
Page(from):
607
Page(to):
618
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819451439 [0819451436]
Language:
English
Call no.:
P63600/5256.1
Type:
Conference Proceedings

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