Advanced FIB mask repair technology for 90-nm/ArF lithography: III
- Author(s):
Tanaka, Y. ( Semiconductor Leading Edge Technologies, Inc. (Japan) ) Itou, Y. ( Semiconductor Leading Edge Technologies, Inc. (Japan) ) Yoshioka, N. ( Semiconductor Leading Edge Technologies, Inc. (Japan) ) Hagiwara, R. ( Seiko Instruments Inc. (Japan) ) Yasaka, A. ( Seiko Instruments Inc. (Japan) ) Takaoka, O. ( Seiko Instruments Inc. (Japan) ) Kozakai, T. ( Seiko Instruments Inc. (Japan) ) Koyama, Y. ( Seiko Instruments Inc. (Japan) ) Sawaragi, H. ( Seiko Instruments Inc. (Japan) ) Sugiyama, Y. ( Seiko Instruments Inc. (Japan) ) Muramatsu, M. ( Seiko Instruments Inc. (Japan) ) Doi, T. ( Seiko Instruments Inc. (Japan) ) Suzuki, K. ( Seiko Instruments Inc. (Japan) ) Okabe, M. ( Seiko Instruments Inc. (Japan) ) Shinohara, M. ( Seiko Instruments Inc. (Japan) ) Matsuda, O. ( Seiko Instruments Inc. (Japan) ) Aita, K. ( Seiko Instruments Inc. (Japan) ) Adachi, T. ( Seiko Instruments Inc. (Japan) ) Morikawa, Y. ( Dai Nippon Printing Co., Ltd. (Japan) ) Nishiguchi, M. ( Dai Nippon Printing Co., Ltd. (Japan) ) Satoh, Y. ( Dai Nippon Printing Co., Ltd. (Japan) ) Hayashi, N. ( Dai Nippon Printing Co., Ltd. (Japan) ) - Publication title:
- 23rd Annual BACUS Symposium on Photomask Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5256
- Pub. Year:
- 2003
- Page(from):
- 526
- Page(to):
- 537
- Pages:
- 12
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819451439 [0819451436]
- Language:
- English
- Call no.:
- P63600/5256.1
- Type:
- Conference Proceedings
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