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Results from a new reticle defect inspection platform

Author(s):
Broadbent, W.H. ( KLA-Tencor Corp. (USA) )
Wiley, J.N. ( KLA-Tencor Corp. (USA) )
Saidin, Z.K. ( KLA-Tencor Corp. (USA) )
Watson, S.G. ( KLA-Tencor Corp. (USA) )
Alles, D.S. ( KLA-Tencor Corp. (USA) )
Zurbrick, L.S. ( KLA-Tencor Corp. (USA) )
Mack, C.A. ( KLA-Tencor Corp. (USA) )
2 more
Publication title:
23rd Annual BACUS Symposium on Photomask Technology
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5256
Pub. Year:
2003
Page(from):
474
Page(to):
488
Pages:
15
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819451439 [0819451436]
Language:
English
Call no.:
P63600/5256.1
Type:
Conference Proceedings

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