Mask pattern fidelity quantification
- Author(s):
Wang, W.-C. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) ) Chang, S.-M. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) ) Chin, C.C. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) ) Lu, C.-L. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) ) Chin, A.S.J. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) ) Hsieh, H.-C. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) ) Yu, S.-S. ( Taiwan Semiconductor Manufacturing Co., Ltd. (Taiwan) ) - Publication title:
- 23rd Annual BACUS Symposium on Photomask Technology
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5256
- Pub. Year:
- 2003
- Page(from):
- 266
- Page(to):
- 275
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash.: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819451439 [0819451436]
- Language:
- English
- Call no.:
- P63600/5256.1
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Global CD uniformity improvement in mask manufacturing for advanced lithography
SPIE - The International Society of Optical Engineering |
7
Conference Proceedings
Fidelity comparison of island patterns with different types of illuminations and phase shift masks
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
8
Conference Proceedings
Defect dispositiong using mask printability analysis on alternating phase-shifting masks
SPIE-The International Society for Optical Engineering |
SPIE-The International Society for Optical Engineering |
9
Conference Proceedings
Double patterning with multilayer hard mask shrinkage for sub-0.25 k1 lithography
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
10
Conference Proceedings
Patterning fidelity on low-energy multiple-electron-beam direct write lithography
Society of Photo-optical Instrumentation Engineers |
SPIE-The International Society for Optical Engineering |
11
Conference Proceedings
Pattern fidelity enhancement with OPC pattern generation on laser lithography [6283-12]
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |
SPIE - The International Society of Optical Engineering |