Principles of highest-precision optical parts estimation on the basis of a point-diffraction interferometer

Principles of highest-precision optical parts estimation on the basis of a point-diffraction interferometer

Author(s):

Voznesensky, N.B. ( VTT Optik Ltd. (Estonia) )
Lee, K.-H. ( Korea Electrotechnology Research Institute (South Korea) )
Kirillovsky, V.K. ( St. Petersburg Institute of Fine Mechanics and Optics (Russia) )

Publication title:

Optical fabrication, testing, and metrology : 30 September-3 October 2003, St. Etienne, France

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5252

Pub. Year:

2004

Page(from):

241

Page(to):

251

Pages:

11

Pub. info.:

Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819451361 [0819451363]

Language:

English

Call no.:

P63600/5252

Type:

Conference Proceedings

Details

TDL ID:	ZA00013597
Series ID:	PA00000029
Conf. info. (Name):	SPIE Optical Systems Design : Optical fabrication, testing, and metrology
Conf. info. (Number):	2003
Conf. info. (Venue):	St. Etienne, France
Conf. info. (Date):	2003.09.30-2003.10.03

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