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Photothermal facility for optical characterization of DUV materials

Author(s):
Publication title:
Advances in optical thin films : 30 September-3 October 2003, St. Etienne, France
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5250
Pub. Year:
2004
Page(from):
597
Page(to):
602
Pages:
6
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819451347 [0819451347]
Language:
English
Call no.:
P63600/5250
Type:
Conference Proceedings

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