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Pulsed laser deposition of thin films: elimination of particulates by second laser irradiation

Author(s):
Publication title:
12th International School on Quantum Electronics: Laser Physics and Applications
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5226
Pub. Year:
2003
Page(from):
327
Page(to):
334
Pages:
8
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819450999 [0819450995]
Language:
English
Call no.:
P63600/5226
Type:
Conference Proceedings

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