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Deposition of multilayer mirrors with arbitrary period thickness distributions

Author(s):
  • Foltyn, T. ( Fraunhofer-Institut fuer Werkstoff- und Strahltechnik (Germany) )
  • Braun, S. ( Fraunhofer-Institut fuer Werkstoff- und Strahltechnik (Germany) )
  • Moss, M. ( Fraunhofer-Institut fuer Werkstoff- und Strahltechnik (Germany) )
  • Leson, A. ( Fraunhofer-Institut fuer Werkstoff- und Strahltechnik (Germany) )
Publication title:
Advances in mirror technology for X-ray, EUV lithography, laser, and other applications : 7-8 August 2003, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5193
Pub. Year:
2004
Page(from):
124
Page(to):
133
Pages:
10
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819450661 [0819450669]
Language:
English
Call no.:
P63600/5193
Type:
Conference Proceedings

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