Equal optical path beam splitters by use of amplitude-splitting and wavefront-splitting methods for pencil beam interferometer
- Author(s):
- Qian, S. ( Brookhaven National Lab. (USA) )
- Takacs, P.Z. ( Brookhaven National Lab. (USA) )
- Publication title:
- Advances in mirror technology for X-ray, EUV lithography, laser, and other applications : 7-8 August 2003, San Diego, California, USA
- Title of ser.:
- Proceedings of SPIE - the International Society for Optical Engineering
- Ser. no.:
- 5193
- Pub. Year:
- 2004
- Page(from):
- 79
- Page(to):
- 88
- Pages:
- 10
- Pub. info.:
- Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
- ISSN:
- 0277786X
- ISBN:
- 9780819450661 [0819450669]
- Language:
- English
- Call no.:
- P63600/5193
- Type:
- Conference Proceedings
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