EUV spectral purity filter: optical and mechanical design, grating fabrication, and testing

EUV spectral purity filter: optical and mechanical design, grating fabrication, and testing

Author(s):

Kierey, H. ( Carl Zeiss Laser Optics GmbH (Germany) )

Heidemann, K.F. ( Carl Zeiss Laser Optics GmbH (Germany) )

Kleemann, B.H. ( Carl Zeiss Laser Optics GmbH (Germany) )

Winters, R. ( Carl Zeiss Laser Optics GmbH (Germany) )

Egle, W/J. ( Carl Zeiss Laser Optics GmbH (Germany) )

Singer, W. ( Carl Zeiss SMT AG (Germany) )

Melzer, F. ( Carl Zeiss SMT AG (Germany) )

Wevers, R. ( Carl Zeiss SMT AG (Germany) )

Antoni, M. ( Carl Zeiss SMT AG (Germany) )

4 more

Publication title:

Advances in mirror technology for X-ray, EUV lithography, laser, and other applications : 7-8 August 2003, San Diego, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5193

Pub. Year:

2004

Page(from):

70

Page(to):

78

Pages:

9

Pub. info.:

Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819450661 [0819450669]

Language:

English

Call no.:

P63600/5193

Type:

Conference Proceedings

Details

TDL ID:	ZA00013561
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : Advances in Mirror Technology for X-Ray, EUV Lithography, Laser, and Other Applications
Conf. info. (Number):	2003
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	2003.08.07-2003.08.08

Similar Items:

1 Conference Proceedings EUV collectors: design, development, fabrication, and testing Egle, W.J., Hafner, W., Matthes, A., Erzin, E., Gaenswein, B., Schwarz, H., Marczuk, P., Antoni, M., Singer, W., Melzer, … SPIE - The International Society of Optical Engineering	7 Conference Proceedings Design and efficiency characterization of diffraction gratings for applications in synchrotron monochromators by electromagnetic methods and its comparison with … Kleemann,B.H., Gatzke,J., Jung,Ch., Nelles,B. SPIE-The International Society for Optical Engineering
2 Conference Proceedings High-efficiency multilayer-coated polymer-overcoated blazed ion-etched holographic gratings for high-resolution EUV astronomical spectroscopy Kowalski, M. P., Cruddace, R. G., Barbee, Jr. T. W., Hunter, W. R., Heidemann, K. F., Nelles, B., Lenke, R., Kierey, H. SPIE - The International Society of Optical Engineering	8 Conference Proceedings Efficiency calibration of the four multilayer-coated holographic ion-etched flight gratings for a sounding rocket high-resolution spectrometer Kowalski,M.P., Gursky,H., Rife,J.C., Yentis,D.J., Cruddace,R.G., Barbee,T.W., Goldstein,W.H., Kordas,J.F., … SPIE-The International Society for Optical Engineering
3 Conference Proceedings Proposed multilayer-grating designs for the Astrophysical Plasmadynamic Explorer (APEX): an EUV high-resolution spectroscopic SMEX Kowalski, M.P., Cruddace, R.G., Wood, K.S., Yentis, D.J., Gursky, H., Barbee, T.W., Fritz, G.G., Hunter, W.R., … SPIE - The International Society of Optical Engineering	9 Conference Proceedings Design and fabrication of microlens and spatial filiter array by self-alignment Yang, R., Chan, K.F., Feng, Z., Mei, W. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Multilayer optics with spectral purity layers for the EUV wavelength range [6151-155] Louis, E., Van de Kruijs, R. W. E, Yakshin, A. E., Van der Westen, S. A, Bijkerk, F., Van Herpen, M. M. J. W., Klunder, … SPIE - The International Society of Optical Engineering	10 Conference Proceedings Source collection optics for EUV lithography Marczuk, P., Egle, W. SPIE - The International Society of Optical Engineering
5 Conference Proceedings Illumination optics design for EUV Ilthography Antoni,M., Singer,W., Schultz,J., Wangler,J., Escudero-Sanz,I., Kruizinga,B. SPIE-The International Society for Optical Engineering	11 Conference Proceedings SDO-EVE multiple EUV grating spectrograph (MEGS) optical design Crotser, D. A., Woods, T. N., Eparvier, F. G., Ucker, G., Kohnert, R. A., Berthiaume, G. D., Weitz, D. M. SPIE - The International Society of Optical Engineering
6 Conference Proceedings Contributions to German and international x-ray and EUV missions in the past 25 years Egle,W.J., Altmann,J., Hasselmann,W., Merkle,F., Beckstette,K.F., Schmidt,M. SPIE - The International Society for Optical Engineering	12 Conference Proceedings Fabrication and testing of holographic gratings Gleeson, M. R., Close, C. E., O'Neill, F. T., Sheridan, J. T. SPIE - The International Society of Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12