Characterizing surface roughness of thin films by polarized light scattering

Characterizing surface roughness of thin films by polarized light scattering

Author(s):

Germer, T.A. ( National Institute of Standards and Technology (USA) )
Fasolka, M.J. ( National Institute of Standards and Technology (USA) )

Publication title:

Advanced characterization techniques for optics, semiconductors, and nanotechnologies : 3-5 August 2003, San Diego, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5188

Pub. Year:

2003

Page(from):

264

Page(to):

275

Pages:

12

Pub. info.:

Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819450616 [0819450618]

Language:

English

Call no.:

P63600/5188

Type:

Conference Proceedings

Details

TDL ID:	ZA00013559
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : Advanced characterization techniques for optics, semiconductors, and nanotechnologies
Conf. info. (Number):	2003
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	2003.08.03-2003.08.05

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