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Digital demodulation of an interferometer for the characterization of vibrating microstructures

Author(s):
Publication title:
Advanced characterization techniques for optics, semiconductors, and nanotechnologies : 3-5 August 2003, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5188
Pub. Year:
2003
Page(from):
61
Page(to):
70
Pages:
10
Pub. info.:
Bellingham, Wash., USA: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819450616 [0819450618]
Language:
English
Call no.:
P63600/5188
Type:
Conference Proceedings

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