Algorithm with optimum noise suppression for surface profiling by white-light interferometry

Algorithm with optimum noise suppression for surface profiling by white-light interferometry

Author(s):

Hirabayashi, A. ( Yamaguchi Univ. (Japan) )
Nakayama, Y. ( Yamaguchi Univ. (Japan) )
Ogawa, H. ( Tokyo Institute of Technology (Japan) )
Kitagawa, K. ( Toray Engineering Co., Ltd. (Japan) )

Publication title:

Optical manufacturing and testing V : 3-5 August 2003, San Diego, California, USA

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5180

Pub. Year:

2003

Page(from):

365

Page(to):

376

Pages:

12

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819450531 [0819450537]

Language:

English

Call no.:

P63600/5180

Type:

Conference Proceedings

Details

TDL ID:	ZA00013554
Series ID:	PA00000029
Conf. info. (Name):	Optics & Photonics : Optical Manufacturing and Testing
Conf. info. (Number):	2003 : 5th
Conf. info. (Venue):	San Diego, CA, USA
Conf. info. (Date):	2003.08.03-2003.08.05

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