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Multiloop control of a nanopositioning mechanism for ultraprecision beam steering

Author(s):
Publication title:
Free-space laser communication and active laser illumination III : 4-6 August 2003, San Diego, California, USA
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5160
Pub. Year:
2003
Page(from):
170
Page(to):
181
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819450333 [0819450332]
Language:
English
Call no.:
P63600/5160
Type:
Conference Proceedings

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