Interferometry of flow fields associated with a F2laser under high-repetition-rate operation

Interferometry of flow fields associated with a F2laser under high-repetition-rate operation

Author(s):

Kasuya, K. ( Tokyo Institute of Technology (Japan) )
Kamiya, T. ( Tokyo Institute of Technology (Japan) )
Sotani, S. ( Tokyo Institute of Technology (Japan) )

Publication title:

XIV International Symposium on Gas Flow, Chemical Lasers, and High-Power Lasers

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5120

Pub. Year:

2003

Page(from):

256

Page(to):

259

Pages:

4

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819449801 [0819449806]

Language:

English

Call no.:

P63600/5120

Type:

Conference Proceedings

Details

TDL ID:	ZA00013531
Series ID:	PA00000029
Conf. info. (Name):	International Symposium on Gas Flow Chemical Lasers, and High-Power Lasers
Conf. info. (Number):	2002 : 14th
Conf. info. (Venue):	Wroclaw, Poland
Conf. info. (Date):	2002.08.25-2002.08.30

Similar Items:

1 Conference Proceedings One-dimensional model calculation of F2 laser under high-repetition-rate operation Kamiya,T., Kasuya,K. SPIE-The International Society for Optical Engineering	7 Conference Proceedings High-repetition-rate fluorine laser for microlithography Fujimoto,J., Nagai,S., Shio,K., Iwata,Y., Takehisa,K., Nishisaka,T., Wakabayashi,O., Mizoguchi,H. SPIE - The International Society for Optical Engineering
2 Conference Proceedings Estimation of F2laser characteristics under high-repetition-rate operation with one-dimensional model calculation Kamiya, T., Kasuya, K. SPIE - The International Society of Optical Engineering	8 Conference Proceedings High-repetition-rate excimer lasers for 193-nm lithography Zschocke, W., Albrecht, H.-S., Schroeder, T., Bragin, I., Lokai, P., Seddighi, F., Reusch, C., Cortona, A., Schmidt, K., … SPIE-The International Society for Optical Engineering
3 Conference Proceedings Quality measurements of Krf laser beams under high-repetition-rate operation with advanced high-speed photography: preparatory experiments K. Kasuya, T. Suzuki, S. Matsuno, M. Watanabe, Y. Kawakita Society of Photo-optical Instrumentation Engineers	9 Conference Proceedings Performance of very high repetition rate ArF lasers Hueber,J.-M., Besaucele,H., Das,P.P., Eis,R., Ershov,A.I., Fleurov,V.B., Gaidarenko,D., Hofmann,T., Melcher,P.C., … SPIE - The International Society for Optical Engineering
4 Conference Proceedings Transient processes under the interaction between gas laser lights and various targets Kasuya,K., Kamiya,T., Funatsu,M., Wu,C., Saitoh,S. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Target ablation experiments with fs IR laser and KrF laser Kasuya, K., Kamiya, T., Sugimoto, T., Mroz, W., Prokopiuk, A., Sakabe, S., Shimizu, S., Okihara, S. SPIE - The International Society of Optical Engineering
5 Conference Proceedings High-power high-repetition-rate F2 lasers for 157-nm lithography Vogler, K., Klaft, I., Voss, F., Bragin, I., Bergmann, E., Nagy, T., Niemoeller, N., Spratte, S., Paetzel, R., Govorkov, … SPIE-The International Society for Optical Engineering	11 Conference Proceedings High repetition rate pin-array UV pre-ionized CO2 laser [6263-09] Silakhori, K., Soltanmoradi, F., Naeimi, A. S., Sadr, R. M., Zand, M. SPIE - The International Society of Optical Engineering
6 Conference Proceedings High-repetition-rate ArF excimer laser for microlithography Wakabayashi,O., Enami,T., Ishii,K., Terashima,K., Itakura,Y., Watanabe,T., Ohta,T., Ohbu,A., Kubo,H., Tanaka,H., … SPIE-The International Society for Optical Engineering	12 Conference Proceedings High-repetition-rate ArF excimer laser for 193-nm lithography Kakizaki,K., Saito,T., Mitsuhashi,K., Arai,M., Tada,A., Kasahara,S., Igarashi,T., Hotta,K. SPIE - The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12