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Analysis of laser drilling process for substrate by optical simulation rectified at the ablation rate

Author(s):
  • Ukita, K. ( Matsushita Industrial Equipment Co., Ltd. (Japan) )
  • Mizutnai, Y. ( Matsushita Industrial Equipment Co., Ltd. (Japan) )
  • Yokohagi, D. ( Matsushita Industrial Equipment Co., Ltd. (Japan) )
  • Ichihashi, K. ( Matsushita Industrial Equipment Co., Ltd. (Japan) )
  • Karasaki, H. ( Matsushita Industrial Equipment Co., Ltd. (Japan) )
Publication title:
Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5063
Pub. Year:
2003
Page(from):
407
Page(to):
410
Pages:
4
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819448699 [0819448699]
Language:
English
Call no.:
P63600/5063
Type:
Conference Proceedings

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