Development of capillary z-pinch discharge EUV light source

Development of capillary z-pinch discharge EUV light source

Author(s):

Watanabe, M. ( Tokyo Institute of Technology (Japan) )

Kasao, T. ( Tokyo Institute of Technology (Japan) )

Okamoto, M. ( Tokyo Institute of Technology (Japan) )

Song, I. H. ( Tokyo Institute of Technology (Japan) )

Okino, A. ( Tokyo Institute of Technology (Japan) )

Horioka, K. ( Tokyo Institute of Technology (Japan) )

Hotta, E. ( Tokyo Institute of Technology (Japan) )

2 more

Publication title:

Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5063

Pub. Year:

2003

Page(from):

278

Page(to):

281

Pages:

4

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819448699 [0819448699]

Language:

English

Call no.:

P63600/5063

Type:

Conference Proceedings

Details

TDL ID:	ZA00013528
Series ID:	PA00000029
Conf. info. (Name):	International Symposium on Laser Precision Microfabrication
Conf. info. (Number):	2003 : 4th
Conf. info. (Venue):	Munich, Germany
Conf. info. (Date):	2003.06.21-2003.03.24

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