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Fabrication of micro-holes in silica glass by femtosecond laser pulses

Author(s):
Iga, Y. ( Osaka Univ. (Japan) )
Watanabe, W. ( Osaka Univ. (Japan) )
Ishizuka, T. ( Osaka Univ. (Japan) )
Li, Y. ( Osaka Univ. (Japan) )
Nishii, J. ( National Institute of Advanced Industrial Science and Technology (AIST) (Japan) )
Itoh, K. ( Osaka Univ. (Japan) )
1 more
Publication title:
Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5063
Pub. Year:
2003
Page(from):
129
Page(to):
132
Pages:
4
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819448699 [0819448699]
Language:
English
Call no.:
P63600/5063
Type:
Conference Proceedings

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