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Fabrication of diffractive phase elements by F2-laser ablation of fused silica

Author(s):
Schulz-Ruthenberg, M. ( Laser-Lab. Goettingen e.V. (Germany) )
Ihlemann, J. ( Laser-Lab. Goettingen e.V. (Germany) )
Marowsky, G. ( Laser-Lab. Goettingen e.V. (Germany) )
Nejadmalayeri, A.H. ( Univ. of Toronto (Canada) )
Ng, M.L. ( Univ. of Toronto (Canada) )
Li, J. ( Univ. of Toronto (Canada) )
Herman, P.R. ( Univ. of Toronto (Canada) )
2 more
Publication title:
Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5063
Pub. Year:
2003
Page(from):
113
Page(to):
117
Pages:
5
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819448699 [0819448699]
Language:
English
Call no.:
P63600/5063
Type:
Conference Proceedings

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