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Fabrication of 3D microreactor structures embedded in photosensitive glass by femtosecond laser

Author(s):
Masuda, M. ( The Institute of Physical and Chemical Research (RIKEN) (Japan) and Tokyo Univ. of Science (Japan) )
Sugioka, K. ( The Institute of Physical and Chemical Research (RIKEN) (Japan) and Tokyo Univ. of Science (Japan) )
Cheng, Y. ( The Institute of Physical and Chemical Research (RIKEN) (Japan) )
Kawachi, M. ( HOYA Photonics Corp. (Japan) )
Shihoyama, K. ( HOYA Photonics Corp. (Japan) )
Toyoda, K. ( Tokyo Univ. of Science (Japan) )
Midorikawa, K. ( The Institute of Physical and Chemical Research (RIKEN) (Japan) )
2 more
Publication title:
Fourth International Symposium on Laser Precision Microfabrication : 21-24 June, 2003, Munich, Germany
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5063
Pub. Year:
2003
Page(from):
98
Page(to):
102
Pages:
5
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819448699 [0819448699]
Language:
English
Call no.:
P63600/5063
Type:
Conference Proceedings

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