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Silicon-on-insulator (SOI) wafer fabrication for MEMS applications

Author(s):
  • KotiReddy, B.R. ( Indian Institute of Technology, Madras (India) )
  • Rao, P.R. ( Indian Institute of Technology, Madras (India) )
  • DasGupta, A. ( Indian Institute of Technology, Madras (India) )
  • Bhat, K.N.H. ( Indian Institute of Technology, Madras (India) )
Publication title:
Smart Materials, Structures, and Systems
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5062
Pub. Year:
2003
Page(from):
840
Page(to):
845
Pages:
6
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819448682 [0819448680]
Language:
English
Call no.:
P63600/5062.2
Type:
Conference Proceedings

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