Blank Cover Image

Synchrotron radiation microlithography and etching (SMILE) for MEMS fabrication

Author(s):
Sugiyama, S. ( Ritsumeikan Univ. (Japan) )  
Publication title:
Smart Materials, Structures, and Systems
Title of ser.:
Proceedings of SPIE - the International Society for Optical Engineering
Ser. no.:
5062
Pub. Year:
2003
Page(from):
821
Page(to):
832
Pages:
12
Pub. info.:
Bellingham, Wash.: SPIE - The International Society of Optical Engineering
ISSN:
0277786X
ISBN:
9780819448682 [0819448680]
Language:
English
Call no.:
P63600/5062.2
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Development of fabrication process for shape control of three-dimensional submicron structure by synchrotron radiation lithography [6037-49]

Fujinawa S., Kato F., Sugiyama S.

SPIE - The International Society of Optical Engineering
7 Conference Proceedings Properties of Synchrotron Radiation

Brown S. George

Plenum Press
2 Conference Proceedings Synchrotron light source and microlithography in Hefei National Synchrotron Radiation Laboratory

Guo, C., Huang, S., Zhou, Y., Qian, S.

SPIE-The International Society for Optical Engineering
8 Conference Proceedings Optimization of TMAH etching for MEMS

Brida,S., Ferrario,L., Guarnieri,V., Giacomozzi,F., Margesin,B., Paranjape,M., Verzellesi,G., Zen,M.

SPIE - The International Society for Optical Engineering
3 Conference Proceedings Fabrication of submicron three-dimensional structure by plane-pattern to the cross-section transfer method using synchrotron radiation lithography [6037-78]

Kato F., Fujinawa S., Tsudo M., Sugiyama S.

SPIE - The International Society of Optical Engineering
9 Conference Proceedings Dense plasma focus radiation source for microlithography and micromachining

Gribkov,V.A., Liu,M., Lee,P.C.K., Lee,S., Srivastava,A.

SPIE-The International Society for Optical Engineering
4 Conference Proceedings Fabrication of high-aspect-ratio precision MEMS with LIGA using synchrotron radiation (Invited Paper)

Khan Malek, C.G.

SPIE-The International Society for Optical Engineering
10 Conference Proceedings Breast tomography with synchrotron radiation

Pani, S., Arfelli, F., Dreossi, D., Montanari, F., Longo, R., Olivo, A., Poropat, P., Zanconati, F., Palma, L.D., …

SPIE-The International Society for Optical Engineering
5 Conference Proceedings Etching error analysis of dot grating array in microlithography fabrication

SPIE - The International Society of Optical Engineering
11 Conference Proceedings Sub-100-nm pattern fabrication using LB resist and e-beam or synchrotron radiation excited plasma

Phatak,G.J., Ogawa,S., Harun,M.Z.Bin, Morita,S.

SPIE - The International Society for Optical Engineering
6 Conference Proceedings Fabrication and simulation of novel crown-shaped microneedle array

Khumpuang, S., Sugiyama, S.

SPIE - The International Society of Optical Engineering
12 Conference Proceedings Fabrication of 0.15 ｦﾌm SOIp-MOSFETs using Synchrotron Radiation X-ray Lithography,

Choi,S.S., Jeon,Y.J., Lyu,J.-S., Yoo,H.J., Fabrizio,E.D., Grella,L., Gentili,M.

SPIE-The International Society for Optical Engineering
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12