Fabrication of 3D high-aspect-ratio microfluidic components using laser machining and LIGA

Fabrication of 3D high-aspect-ratio microfluidic components using laser machining and LIGA

Author(s):

Ghantasala, M.K. ( Swinburne Univ. of Technology (Australia) )
Barber, R.C. ( Swinburne Univ. of Technology (Australia) )
Moldovan, N.A. ( Argonne National Lab. (USA) )
Mancini, D.C. ( Argonne National Lab. (USA) )
Harvey, E,C. ( Swinburne Univ. of Technology (Australia) )

Publication title:

Smart Materials, Structures, and Systems

Title of ser.:

Proceedings of SPIE - the International Society for Optical Engineering

Ser. no.:

5062

Pub. Year:

2003

Page(from):

342

Page(to):

346

Pages:

5

Pub. info.:

Bellingham, Wash.: SPIE - The International Society of Optical Engineering

ISSN:

0277786X

ISBN:

9780819448682 [0819448680]

Language:

English

Call no.:

P63600/5062.1

Type:

Conference Proceedings

Details

TDL ID:	ZA00013526
Series ID:	PA00000029
Conf. info. (Name):	Smart materials, structures, and systems
Conf. info. (Number):	2002
Conf. info. (Venue):	Bangalore, India
Conf. info. (Date):	2002.12.12-2002.12.14

Similar Items:

1 Conference Proceedings An investigation of SU-8 resist adhesion in deep x-ray lithography of high-aspect-ratio structures Barber, R.L., Ghantasala, M.K., Divan, R., Mancini, D.C., Harvey, E.C. SPIE - The International Society of Optical Engineering	7 Conference Proceedings Laser-LIGA for Ni microcantilevers Jin, H., Harvey, E.C., Hayes, J.P., Ghantasala, M.K., Fu, Y., Jolic, K., Solomon, M., Graves, K. SPIE-The International Society for Optical Engineering
2 Conference Proceedings LIGA fabrication of high-aspect-ratio lobster-eye optics Peele, A.G., Irving, T.H.K., Nugent, K.A., Mancini, D.C., Moldovan, N.A., Christenson, T.R. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Laser LIGA for serpentine Ni microstructures Jin, H., Harvey, E.C., Hayes, J.P., Ghantasala, M.K., Dowling, A., Solomon, M., Davies, S.T. SPIE-The International Society for Optical Engineering
3 Conference Proceedings Progress in the fabrication of high-aspect-ratio zone plates by soft x-ray lithography Divan, R., Mancini, D.C., Moldovan, N.A., Lai, B.P., Assoufid, L., Leonard, Q.J., Cerrina, F. SPIE-The International Society for Optical Engineering	9 Conference Proceedings Fabrication of uniformly redundant arrays and Young's slits for coherene measurements in x-ray Moldovan, N.A., Paterson, D., Divan, R., Mancini, D.C., Lin, J., Nugent, K.A., McNulty, I. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Laser micromachining and nickel plating of high-aspect-ratio structures in polymer molds Jin,H., Ghantasala,M.K., Hayes,J.P., Jolic,K., Harvey,E.C. SPIE-The International Society for Optical Engineering	10 Conference Proceedings influence of patterning geometry on the electrodeposition of microstructures fabricated by laser LIGA Jin, H., Davies, S.T., Ghantasala, M.K., Hayes, J.P., Harvey, E.C. SPIE-The International Society for Optical Engineering
5 Conference Proceedings Fabrication of microstructures with different aspect ratios in a single layer Fu, Y., Harvey, E. C., Ghantasala, M. K. SPIE - The International Society of Optical Engineering	11 Conference Proceedings Excimer laser micromachining of structures using SU-8 Ghantasala,M.K., Harvey,E.C., Sood,D.K. SPIE - The International Society for Optical Engineering
6 Conference Proceedings LIGA for lobster? Peele,A.G., Irving,T.H.K., Nugent,K.A., Mancini,D.C., Moldovan,N.A., Christenson,T.R., Petre,R., Brumby,S.P., … SPIE-The International Society for Optical Engineering	12 Conference Proceedings Laser ablation and lift-off technique for fabricating simple microfluidic devices Hayes,J.P., Harvey,E.C., Ghantasala,M.K., Dempster,B.C. SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12