Structural Defects Formed in Al-Implanted and Annealed 4H-SiC

Structural Defects Formed in Al-Implanted and Annealed 4H-SiC

Author(s):

Jones, K.A.

Publication title:

Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003

Title of ser.:

Materials science forum

Ser. no.:

457-460

Pub. Year:

2004

Page(from):

889

Page(to):

892

Pages:

4

Pub. info.:

Uetikon-Zuerich: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878499434 [0878499431]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00013364
Series ID:	PA00000012
Conf. info. (Name):	ICSCRM : Intenational Conference on Silicon Carbide and Related Materials
Conf. info. (Number):	2003 : 10th
Conf. info. (Venue):	Lyon, France
Conf. info. (Date):	2003.10.05-2003.10.10

Similar Items:

1 Conference Proceedings Activation of Implanted Al and Co-Implanted Al/C or Al/Si in 4H-SiC Jones, K.A., Zheleva, T.S., Ervin, M.H., Shah, P.B., Derenge, M.A., Gerardi, G.J., Freitas, J.A., Vispute, R.D. Trans Tech Publications	7 Conference Proceedings Variations in the Effects of Implanting Al at Different Concentrations into SiC Jones, K.A., Zheleva, T.S., Shah, P.B., Derenge, M.A., Freitas, J.A., Gerardi, G.J., Vispute, R.D., Hullavard, S., Dar, … Trans Tech Publications
2 Conference Proceedings Comparison of Al and Al/C Co-Implants in 4H-SiC Annealed with an AlN Cap Jones, K.A., Shah, P.B., Derenge, M.A., Ervin, M.H., Gerardi, G.J., Freitas, J.A.,Jr., Braga, G.C.B., Vispute, R.D., … Trans Tech Publications	8 Conference Proceedings 1kV 4H-SiC JBS Rectifiers Fabricated Using an AlN Capped Anneal Zhu, L., Shanbhag, M., Chow, T.P., Jones, K.A., Ervin, M.H., Shah, P.B., Derenge, M.A., Vispute, R.D., Venkatesan, T., … Trans Tech Publications
3 Conference Proceedings Comparison of Al and Al/C Co-Implants in 4H-SiC Annealed with an AlN Cap Jones, K.A., Shah, P.B., Derenge, M.A., Ervin, M.H., Gerardi, G.J., Freitas, J.A., Jr., Braga, G.C.B., Vispute, R.D., … Trans Tech Publications	9 Conference Proceedings Activating Ion Implants in 4H-SiC by Annealing with An AIN or BN Cap* Jones, K., Shah, P.B., Ervin, M.H., Deenge, M.A., Vispute, R.D., Freitas, L.A., Gerardi, G.J. Electrochemical Society
4 Conference Proceedings Observation of Thermal-Annealing Evolution of Defects in Ion-Implanted 4H-SiC by Luminsescence Freitas, J.A.Jr., Jones, K.A., Derenge, M.A., Vispute, R.D., Hullavard, S. Trans Tech Publications	10 Conference Proceedings Epitaxial TaC Films for the Selective Area Growth of SiC K.A. Jones, T.S. Zheleva, R.D. Vispute, S.S. Hullavarad, M. Ervin Trans Tech Publications
5 Conference Proceedings Characteristics and Ionization Coefficient Extraction of 1kv 4H-SiC Implanted Anode PiN Rectifiers with Near Ideal Performance Fabricated Using AlN Capped … Zhu, L., Losee, P.A., Chow, T.P., Jones, K.A., Scozzie, C.J., Ervin, M.H., Shah, P.B., Derenge, M.A., Vispute, R.D., … Trans Tech Publications	11 Conference Proceedings Approaches for Reduction of the Defect Density in Group III Nitride Based Heterostructures Zheleva, T. S., Karoui, F., Kirchner, K., Derenge, M., Jones, K.A., Vispute, R.D., Venkatesan, T. Materials Research Society
6 Conference Proceedings Comparison of Graphite and BN/AlN Annealing Caps for Ion Implanted SiC K.A. Jones, M.C. Wood, T.S. Zheleva, K.W. Kirchner, M.A. Derenge, A. Bolonikov, T.S. Sudarshan, R.D. Vispute, S.S. … Trans Tech Publications	12 Conference Proceedings Annealing Study of Ga Implanted p-Type 6H-SiC for Ohmic Contact Metallizations Pernatt, M., Ikiadis, A.A., Vispute, R.D., Wood, M.C., Derenge, M., Geil, B., Jones, K.A. Materials Research Society

1

2

3

4

5

6

7

8

9

10

11

12