In-Situ Investigation of Carbon Reduction at Ni/4H-SiC Interface Using a Silicon Interlayer

In-Situ Investigation of Carbon Reduction at Ni/4H-SiC Interface Using a Silicon Interlayer

Author(s):

Publication title:

Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003

Title of ser.:

Materials science forum

Ser. no.:

457-460

Pub. Year:

2004

Page(from):

849

Page(to):

852

Pages:

4

Pub. info.:

Uetikon-Zuerich: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878499434 [0878499431]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00013364
Series ID:	PA00000012
Conf. info. (Name):	ICSCRM : Intenational Conference on Silicon Carbide and Related Materials
Conf. info. (Number):	2003 : 10th
Conf. info. (Venue):	Lyon, France
Conf. info. (Date):	2003.10.05-2003.10.10

Similar Items:

1 Conference Proceedings The Formation of Low Resistance Ohmic Contacts to 4H-SiC, Circumventing the Need for Post Annealing, Studied by Specific Contact Resistance Measurements and … Guy, O.J., Pope, G., Blackwood, I., Teng, K.S., Lee, W.Y., Wilks, S.P., Mawby, P.A. Trans Tech Publications	7 Conference Proceedings Use of SiCl₄ as Silicon Precursor for Low-Temperature Halo-Carbon Epitaxial Growth of 4H-SiC S.P. Kotamraju, B. Krishnan, G. Melnychuk, Y. Koshka Trans Tech Publications
2 Conference Proceedings Ellipsometric and XPS Studies of 4H-SiC/SiO2 Interfaces, and Sacrificial Oxide Stripped 4H-SiC Surfaces Guy, O.J., Chen, L., Pope, G., Teng, K.S., Maffeis, T., Wilks, S.P., Mawby, P.A., Jenkins, T., Brieva, A., Hayton, D.J. Trans Tech Publications	8 Conference Proceedings ESR STUDY OF POROUS SILICON Cheung, W.Y., Wong, S.P., Wilson, I.H., Kan, C.F., Hark, S.K. Materials Research Society
3 Conference Proceedings Ellipsometric Study of Thermal Silicon Oxide and Sacrificial Silicon Oxide on 4H-SiC Chen, L., Guy, O.J., Pope, G., Teng, K.S., Maffeis, T., Wilks, S.P., Mawby, P.A., Jenkins, T., Brieva, A., Hayton, D.J. Trans Tech Publications	9 Conference Proceedings Investigations of the Low Dielectric Constant Fluorinated Polyimide for Use as the Interlayer Dielectric in ULSI Lee, Y. K., Murarka, S. P., Jeng, S. -P., Auman, B. MRS - Materials Research Society
4 Conference Proceedings Investigation of Graphene Growth on 4H-SiC A. Castaing, O.J. Guy, M. Lodzinski, S.P. Wilks Trans Tech Publications	10 Conference Proceedings Temperature Induced Phase Transformation on the 4H-SiC(11-20) Surface Lee, W.Y., Soubatch, S., Starke, U. Trans Tech Publications
5 Conference Proceedings In-Situ FTIR Investigation of Sulfate Adsorbed on Cu(111) Lee, K.H., Lee, H.Y., Jeung, W.Y. Electrochemical Society	11 Conference Proceedings SiC Pore Surfaces: Surface Studies of 4H-SiC(1-102) and 4H-SiC(-110-2) Starke, U., Lee, W.Y., Coletti, C., Saddow, S.E., Devaty, R.P., Choyke, W.J. Trans Tech Publications
6 Conference Proceedings Ellipsometric and MEIS Studies of 4H-SiC/Si/SiO2 and 4H-SiC/SiO2 Interfaces for MOS Devices O.J. Guy, T.E. Jenkins, M. Lodzinski, A. Castaing, S.P. Wilks, P. Bailey, T.C.Q. Noakes Trans Tech Publications	12 Conference Proceedings Surface Preparation of 6H-Silicon Carbide Substrates for Growth of High-Quality SiC Epilayers Lee, K.S., Lee, S.H., Kim, M., Nahm, K.S. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12