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Growth of Homoepitaxial Films on 4H-SiC(11-20)and 8° Off-Axis 4H-SiC(0001) Substrates and their Characterization

Author(s):
Bishop, S.M.
Preble, E.A.
Hallin, C.
Henry, A.
Storasta, L.
Jacobson, H.
Wagner, B.P.
Reitmeier, Z.J.
Janzen, E.
Davis, R.F.
5 more
Publication title:
Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003
Title of ser.:
Materials science forum
Ser. no.:
457-460
Pub. Year:
2004
Page(from):
221
Page(to):
224
Pages:
4
Pub. info.:
Uetikon-Zuerich: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878499434 [0878499431]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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