In Situ SiC Feeding by Chemical Vapor Deposition for Bulk Growth

In Situ SiC Feeding by Chemical Vapor Deposition for Bulk Growth

Author(s):

Charpentier, L.

Publication title:

Silicon carbide and related materials 2003 : ICSCRM, 2003 : proceedings of the 10th International Conference on Silicon Carbide and Related Materials 2003, Lyon, France, October 5-10, 2003

Title of ser.:

Materials science forum

Ser. no.:

457-460

Pub. Year:

2004

Page(from):

139

Page(to):

142

Pages:

4

Pub. info.:

Uetikon-Zuerich: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878499434 [0878499431]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00013363
Series ID:	PA00000012
Conf. info. (Name):	ICSCRM : Intenational Conference on Silicon Carbide and Related Materials
Conf. info. (Number):	2003 : 10th
Conf. info. (Venue):	Lyon, France
Conf. info. (Date):	2003.10.05-2003.10.10

Similar Items:

1 Conference Proceedings Towards a Continuous Feeding of the PVT Growth Process: an Experimental Investigation Chaussende, D., Baillet, F., Charpentier, L., Pernot, E., Pons, M., Madar, R. Trans Tech Publications	7 Conference Proceedings Progress and Limits of the Numerical Simulation of SiC Bulk and Epitaxy Growth Processes Pons, M., Blanquet, E., Dedulle, J. M., Ucar, M., Wellmann, P., Danielsson, O., Ferret, P., Cioccio, L. Di, Baillet, F., … Trans Tech Publications
2 Conference Proceedings Comparison between Various Chemical Systems for the CVD Step in the CF-PVT Crystal Growth Method Auvray, L., Chaussende, D., Baillet, F., Charpentier, L., Pons, M., Madar, R. Trans Tech Publications	8 Conference Proceedings Solid-Phase Epitaxial Growth of Bulk SiC Single Crystals Pernot, E., Anikin, M., Pons, M., Chaix-Pluchery, O., Baillet, F., Matko, I., Madar, R. Trans Tech Publications
3 Conference Proceedings Characterization of Thick 2-Inch 4H-SiC Layers Grown by the Continuous Feed-Physical Vapor Transport Method Chaussende, D., Balloud, C., Auvray, L., Baillet, F., Zielinski, M., Juillaguet, S., Mermoux, M., Pernot, E., Camassel, … Trans Tech Publications	9 Conference Proceedings Solid-Phase Epitaxial Growth of Bulk SiC Single Crystals Pernot, E., Anikin, M., Pons, M., Chaix-Pluchery, O., Baillet, F., Matko, I., Madar, R. Trans Tech Publications
4 Conference Proceedings Heat Transfer Modeling of a New Crystal Growth Process Baillet, F., Chaussende, D., Charpentier, L., Pernot, E., Pons, M., Madar, R. Trans Tech Publications	10 Conference Proceedings Nucleation and Growth of 3C-SiC Single Crystals from the Vapor Phase D. Chaussende, J. Eid, F. Mercier, R. Madar, M. Pons Trans Tech Publications
5 Conference Proceedings A Study of HTCVD Renewing of the SiC Polycrystalline Source during the PVT Process Charpentier, L., Baillet, F., Chaussende, D., Pernot, E., Pons, M., Madar, R. Trans Tech Publications	11 Conference Proceedings Characterization of Bulk <> 3C-SiC Single Crystals Grown on 4H-SiC by the CF-PVT Method Latu-Romain, L., Chaussende, D., Balloud, C., Juillaguet, S., Rapenne, L., Pernot, E., Camassel, J., Pons, M., Madar, R. Trans Tech Publications
6 Conference Proceedings Electron Back Scattering Diffraction (EBSD) as a Tool for the Investigation of 3C-SiC Nucleation and Growth on 6H or 4H Chaussende, D., Chaudouet, P., Auvray, L., Pons, M., Madar, R. Trans Tech Publications	12 Conference Proceedings Growth of AlN and AlN-SiC Solid Solution by Sublimation Method Anikin, M., Chaussende, D., Pernot, E., Chaix-Pluchery, O., Roussel, H., Pons, M., Madar, R. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12