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Comparative Study of Porosity in Low-k SiOCH Thin Films Obtained at Different Deposition Conditions

Author(s):
Brusa, R.S.
Macchi, C.
Mariazzi, S.
Spagolla, M.
Karwasz, G.P.
Zecca, A.
1 more
Publication title:
Positron annihilation ICPA-13 : proceedings of the 13th International Conference on Positron Annihilation, Kyoto, Japan, September 2003
Title of ser.:
Materials science forum
Ser. no.:
445-446
Pub. Year:
2004
Page(from):
268
Page(to):
270
Pages:
3
Pub. info.:
Uetikon-Zuerich: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878499366 [0878499369]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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