Effects of Current Waveform and Bath Temperature on Surface Morphology and Texture of Copper Electrodeposits for ULSI

Effects of Current Waveform and Bath Temperature on Surface Morphology and Texture of Copper Electrodeposits for ULSI

Author(s):

Publication title:

Textures of materials : ICOTOM 13 : proceedings of the 13th International Conference on Textures of Materials, Seoul, Korea, August 26-30, 2002

Title of ser.:

Materials science forum

Ser. no.:

408-412

Pub. Year:

2002

Page(from):

1657

Page(to):

1662

Pages:

6

Pub. info.:

Uetikon-Zuerich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878499038 [0878499032]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00013339
Series ID:	PA00000012
Conf. info. (Name):	International Conference on Textures of Materials - ICOTOM
Conf. info. (Number):	13th
Conf. info. (Venue):	Seoul, Korea
Conf. info. (Date):	2002.08.26-2002.08.30

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