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Dynamic Characteristics of Diaphragm Microactuators Utilizing Sputter-Deposited TiNi Shape-Memory Alloy Thin Films

Author(s):
Publication title:
Shape memory materials and its applications : proceedings of the International Conference on Shape Memory and Superelastic Technologies and Shape Memory Materials (SMST-SMM 2001), held in Kunming, China, September 2 to 6 2001
Title of ser.:
Materials science forum
Ser. no.:
394-395
Pub. Year:
2002
Page(from):
467
Page(to):
474
Pages:
8
Pub. info.:
Zurich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878498963 [0878498966]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

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