Blank Cover Image

Aluminum and Boron Diffusion into (1-100) Face SiC Substrates

Author(s):
Publication title:
Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001
Title of ser.:
Materials science forum
Ser. no.:
389-393
Pub. Year:
2002
Page(from):
557
Page(to):
560
Pages:
4
Pub. info.:
Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878498949 [087849894X]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Aluminum and Boron Diffusion into (1-100) Face SiC Substrates

Soloviev, S.I., Gao, Y., Khlebnikov, Y., Khlebnikov, I.I., Sudarshan, T.S.

Trans Tech Publications
7 Conference Proceedings Oxidation of Porous 4H-SiC Substrates

Soloviev, S., Das, T., Sudarshan, T.S.

Trans Tech Publications
2 Conference Proceedings Selective Doping of 6H-SiC by Diffusion of Boron

Soloviev, S. I., Gao, Y., Khlebnikov, I. I., Sudarshan, T. S.

Trans Tech Publications
8 Conference Proceedings Oxidation of Porous 4H-SiC Substrates

Soloviev, S., Das, T., Sudarshan, T.S.

Trans Tech Publications
3 Conference Proceedings Selective Doping of 4H-SiC by Aluminum/Boron Co-Diffusion

Gao, Ying, Soloviev, S.I., Wang, X., Tin, C.C., Sudarshan, T.S.

Materials Research Society
9 Conference Proceedings SiC Epitaxial Growth on Carbon

Khlebnikov, I., Madangarli, V., Sudarshan, T. S.

MRS - Materials Research Society
4 Conference Proceedings Correlation Between Oxide Breakdown and Defects in SiC Wafers

Soloviev, S., Khlebnikov, I., Madangarli, V., Sudarshan, T. S.

MRS - Materials Research Society
10 Conference Proceedings Initial Stage of Crystallization in the Growth of Silicon Carbide on Substrate with Micropipes

Khlebnikov, I. I., Cherednichenko, D. I., Khlebnikov, Y., Sudarshan, T. S.

Trans Tech Publications
5 Conference Proceedings An Analytical Study of the SiC Growth Process from Vapor Phase

Cherednichenko, D. I., Khlebnikov, Y. I., Khlebnikov, I. I., Soloviev, S. I., Sudarshan, T. S.

Trans Tech Publications
11 Conference Proceedings Study of Forward Voltage Drift in Diffused SiC PiN Diodes Doped by Al or B

Maximenko, S., Soloviev, S., Grekov, A., Bolotnikov, A., Gao, Y., Sudarshan, T. S.

Trans Tech Publications
6 Conference Proceedings Thick oxide layers on N and P SiC wafers by a depo-conversion technique

Zhang, Q., Madangarli, V., Khlebnikov, I., Soloviev, S., Sudarshan, T. S.

MRS-Materials Research Society
12 Conference Proceedings A Technique for Rapid Thick Film SiC Epitaxial Growth

Khlebnikov, I., Sudarshan, T. S., Madangarli, V., Capano, M. A.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12