Surface Morphology of SiC Epitaxial Layers Grown by Vertical Hot-Wall Type CVD

Surface Morphology of SiC Epitaxial Layers Grown by Vertical Hot-Wall Type CVD

Author(s):

Takahashi, K.

Publication title:

Silicon carbide and related materials 2001 : ICSCRM2001, proceedings of the International Conference on Silicon Carbide and Related Materials 2001, Tsukuba, Japan, October 28-November 2, 2001

Title of ser.:

Materials science forum

Ser. no.:

389-393

Pub. Year:

2002

Page(from):

243

Page(to):

246

Pages:

4

Pub. info.:

Zuerich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878498949 [087849894X]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00013330
Series ID:	PA00000012
Conf. info. (Name):	International Conference on Silicon Carbide and Related Materials
Conf. info. (Number):	2001
Conf. info. (Venue):	Tsukuba, Japan
Conf. info. (Date):	2001.10.28-2001.11.02

Similar Items:

1 Conference Proceedings Surface Morphology of SiC Epitaxial Layers Grown by Vertical Hot-Wall Type CVD Takahashi, K., Uchida, M., Yokogawa, T., Kusumoto, O., Yamashita, K., Miyanaga, R., Kitabatake, M. Trans Tech Publications	7 Conference Proceedings Vertical Hot-Wall Type CVD for SiC Growth Takahashi, K., Uchida, M., Kitabatake, M., Uenoyama, T. Trans Tech Publications
2 Conference Proceedings Delta-Doped Layers of SiC Grown by 'Pulse Doping' Technique Takahashi, K., Yokogawa, T., Uchida, M., Kusumoto, O., Yamashita, K., Miyanaga, R., Kitabatake, M. Trans Tech Publications	8 Conference Proceedings 4H-SiC Delta-Doped Accumulation-Channel MOS FET Yokogawa, T., Takahashi, K., Kusumoto, O., Uchida, M., Yamashita, K., Kitabatake, M. Trans Tech Publications
3 Conference Proceedings Delta-Doped Layers of SiC Grown by 'Pulse Doping' Technique Takahashi, K., Yokogawa, T., Uchida, M., Kusumoto, O., Yamashita, K., Miyanaga, R., Kitabatake, M. Trans Tech Publications	9 Conference Proceedings 4H-SiC Delta-Doped Accumulation-Channel MOS FET Yokogawa, T., Takahashi, K., Kusumoto, O., Uchida, M., Yamashita, K., Kitabatake, M. Trans Tech Publications
4 Conference Proceedings SiC Vertical DACFET (Vertical Delta-Doped Accumulation Channel MOSFET) Kusumoto, O., Yokogawa, T., Yamashita, K., Takahashi, K., Kitabatake, M., Uchida, M., Miyanaga, R. Trans Tech Publications	10 Conference Proceedings SIMS Analyses of SiO2/4H-SiC(0001) Interface Yamashita, K., Kitabatake, M., Kusumoto, O., Takahashi, K., Uchida, M., Miyanaga, R., Itoh, H., Yoshikawa, M. Trans Tech Publications
5 Conference Proceedings SiC Vertical DACFET (Vertical Delta-Doped Accumulation Channel MOSFET) Kusumoto, O., Yokogawa, T., Yamashita, K., Takahashi, K., Kitabatake, M., Uchida, M., Miyanaga, R. Trans Tech Publications	11 Conference Proceedings SIMS Analyses of SiO2/4H-SiC(0001) Interface Yamashita, K., Kitabatake, M., Kusumoto, O., Takahashi, K., Uchida, M., Miyanaga, R., Itoh, H., Yoshikawa, M. Trans Tech Publications
6 Conference Proceedings Formation of SiC Delta-Doped-Layer Structures by CVD Takahashi, K., Uchida, M., Kusumoto, O., Yamashita, K., Miyanaga, R., Kitabatake, M. Trans Tech Publications	12 Conference Proceedings SiC Delta-Doped-Layer Structures and DACFET Takahashi, K., Kusumoto, O., Uchida, M., Yamashita, K., Kitabatake, M. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12