Blank Cover Image

Ion Implantation Induced Defects in 6H-SiC and their Annealing Behaviour

Author(s):
Publication title:
Positron annihilation, ICPA-12 : Proceedings of the 12th International Conference on Positron Annihilation, August 6-12, 2000, München, Germany
Title of ser.:
Materials science forum
Ser. no.:
363-365
Pub. Year:
2001
Page(from):
442
Page(to):
444
Pages:
3
Pub. info.:
Zuerich, Switzerland: Trans Tech Publications
ISSN:
02555476
ISBN:
9780878498758 [0878498753]
Language:
English
Call no.:
M23650
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings High Concentration Doping of 6H-SiC by Ion Implantation: Flash versus Furnace Annealing

Panknin, D., Wirth, H., Anwand, W., Brauer, G., Skorupa, W.

Trans Tech Publications
7 Conference Proceedings Flash Lamp Annealing of Implantation Doped p- and n-Type 6H-SiC

Panknin, D., Gebel, T., Skorupa, W.

Trans Tech Publications
2 Conference Proceedings Investigation of Ion-Implantation Induced Damage in 6H-SiC by RBS/C and PAS

Wirth,H., Anwand,W., Brauer,G., Voelskow,M., Pankuin,D., Skorupa,W., Coleman,P.G.

Trans Tech Publications
8 Conference Proceedings Structural Defects in Ion Implanted 4H-SiC Epilayers

Persson, P.O.Å., Skorupa, W., Panknin, D., Kuznetsov, A., Hallen, A., Hultman, L.

Materials Research Society
3 Conference Proceedings Characterization of Vacancy-Type Defects in Ion Implanted and Annealed SiC by Positron Annihilation Spectroscopy

Anwand, W., Brauer, G., Coleman, P. G., Skorupa, W.

MRS - Materials Research Society
9 Conference Proceedings Aluminum and Electron-Irradiation-Induced Deep Levels in n-Type and p-Type 6H-SiC

Gong, M., Beling, C. D., Fung, S., Brauer, G., Wirth, H., Skorupa, W., You, Z-P.

MRS - Materials Research Society
4 Conference Proceedings Slow Positron Beam Investigations of Defects Caused by B+ Implantation into Epitaxial 6H-SiC

Anwand, W., Brauer, G., Kuriplach, J., Skorupa, W.

Trans Tech Publications
10 Conference Proceedings Improved p-Type Conductivity in Heavily Al-Doped SiC by Ion-Beam-Induced Nano-Crystallization

Heera, V., Madhusoodanan, K.N., Mucklich, A., Panknin, D., Skorupa, W.

Trans Tech Publications
5 Conference Proceedings Raman scattering analysis of defects in 6H-SiC induced by ion implantation

Perez-Rodriguez,A., Gonzalez-Varona,O., Calvo-Barrio,L., Morante,J.R., Wirth,H., Panknin,D., Skorupa,W.

Trans Tech Publications
11 Conference Proceedings Damage Induced by Argon Ion Implantation in Cubic Zirconia

Fradin, J., Thome, T., Grynszpan, R.I., Thome, L., Anwand, W., Brauer, G.

Trans Tech Publications
6 Conference Proceedings Deep Level Defects in He-Implanted n-6H-SiC Studied by Deep Level Transient Spectroscopy

Chen, X.D., Ling, C.C., Fung, S., Beling, C.D., Wu, H.S., Brauer, G., Anwand, W., Skorupa, W.

Materials Research Society
12 Conference Proceedings Structural Characterization of Thin 3C-SiC Films Annealed by the Flash Lamp Process

Polychroniadis, E., Stoemenos, J., Ferro, G., Monteil, Y., Panknin, D., Skorupa, W.

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12