Dependence of Wet Oxidation on the Defect Density in 3C-SiC

Dependence of Wet Oxidation on the Defect Density in 3C-SiC

Author(s):

Publication title:

Silicon carbide and related materials : ECSCRM2000, proceedings of the 3rd European Conference on Silicon Carbide and Related Materials, Kloster Banz, Germany, September 2000

Title of ser.:

Materials science forum

Ser. no.:

353-356

Pub. Year:

2001

Page(from):

663

Page(to):

668

Pages:

6

Pub. info.:

Uetikon-Zuerich, Switzerland: Trans Tech Publications

ISSN:

02555476

ISBN:

9780878498734 [0878498737]

Language:

English

Call no.:

M23650

Type:

Conference Proceedings

Details

TDL ID:	ZA00013315
Series ID:	PA00000012
Conf. info. (Name):	ECSCRM : European Conference on Silicon Carbide and Related Materials
Conf. info. (Number):	2000 : 3rd
Conf. info. (Venue):	Benediktinerkloster Banz, Germany
Conf. info. (Date):	2000.09.00

Similar Items:

1 Conference Proceedings Selective Deposition of 3C-SiC Epitaxially Grown on SOI Subtrates Eickhoff, M., Zappe, S., Nielsen, A., Krotz, G., Obermeier, E., Vouroutzis, N., Stoemenos, J. Trans Tech Publications	7 Conference Proceedings Structural Characteristics of 3C-SiC Films Epitaxially Grown on the Si/Si3N4/SiO2 System Zappe, S., Moller, H., Krotz, G., Eickhoff, M., Skorupa, W., Obermeier, E., Stoemenos, J. Trans Tech Publications
2 Conference Proceedings Improvement of the 3C-SiC/Si Interface by Flash Lamp Annealing Panknin, D., Stoemenos, J., Eickhoff, M., Heera, V., Vouroutzis, N., Krotz, G., Skorupa, W. Trans Tech Publications	8 Conference Proceedings Behavior of Micropipes during Growth in 4H-SiC Vouroutzis, N., Yakimova, R., Syvaejaervi, M., Jacobson, H., Stoemenos, J., Janzen, E. Trans Tech Publications
3 Conference Proceedings High Temperature 10 Bar Pressure Sensor Based on 3C-SiC/SOI for Turbine Control Applications Zappe, S., Franklin, J., Obermeier, E., Eickhoff, M., Moeller, H., Kroetz, G., Rougeot, C., Lefort, O., Stoemenos, J. Trans Tech Publications	9 Conference Proceedings Behavior of Micropipes during Growth in 4H-SiC Vouroutzis, N., Yakimova, R., Syvajarvi, M., Jacobson, H., Stoemenos, J., Janzen, E. Trans Tech Publications
4 Conference Proceedings SOL Thinning Effects on 3C-SiC on SOI Planes, N., Moller, H., Camassel, J., Stoemenos, Y., Falkovski, L., Eickhoff, M., Krotz, G. Trans Tech Publications	10 Conference Proceedings Strain and Strain Relaxation in SOI Materials Planes, J.Camassel, Falkovski, N., Moller, L., Eickhoff, H., G., M.Kroetz Electrochemical Society
5 Conference Proceedings Process Induced Extended Defects in SiC Grown via Sublimation Yakimova, R., Syvajarvi, M., Jacobson, H., Ciechonski, R.R., Vouroutzis, N., Stoemenos, J. Materials Research Society	11 Conference Proceedings Formation of 3C-SiC Films Embedded in SiO2 by Sacrificial Oxidation Panknin, D., Godignon, P., Mestres, N., Polychroniadis, E., Stoemenos, J., Ferro, G., Pezoldt, J., Skorupa, W. Trans Tech Publications
6 Conference Proceedings Characteristics of Planar Defects in Shallow Trenches Related to the Presence of Micropipes Vouroutzis, N., Syvajarvi, M., Stoemenos, J., Yakimova, R. Trans Tech Publications	12 Conference Proceedings SiC Defect Density Reduction by Epitaxy on Porous Surfaces Saddow, S.E., Mynbaeva, M., Choyke, W.J., Devaty, R.P., Bai, S., Melnychuck, G., Koshka, Y., Dmitriev, V., Wood, C.E.C. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12